NuTool, Inc. Demonstrates Electro Chemical Mechanical Deposition (ECMD(tm)) Technology at Semicon West 2001
Planar Copper Deposition Mechanism Creates New Rules for Interconnect
MILPITAS, Calif. - July 11, 2001 - As a part of Semicon West 2001, San Francisco's largest semiconductor trade show and convention, NuTool, Inc. of Milpitas will host its second technology presentation regarding Electro Chemical Mechanical Deposition (ECMD(tm)), its revolutionary technology for planar copper deposition. This seminar will describe the technology as well as provide results.
NuTool's ECMD(tm) technology deposits planar copper films on the surface of wafers with very low film thickness, 50% of the feature depth or less. This technology significantly reduces copper CMP cost, as well as reducing cycle times and enhancing yield. Additionally, ECMD(tm) technology provides enabling capability including significant reduction in dishing and erosion.
Semiconductor devices at higher speeds require the transistor interconnection material to transition from conventional aluminum to even less resistant copper. The market size for copper electroplating systems is expected to become approximately $500 Million in 2003 with steady growth. NuTool's ECMD(tm) technology will enhance the adoption rate of copper while also lowering the cost of implementation.
Seminars are scheduled for Monday, July 16 in the Commonwealth Room and Tuesday, July 17 in the Civic Room, from 2 to 4 PM in the Argent Hotel, 3rd and Market, San Francisco. Reservations are required and may be obtained by calling Brian Stickney, 408-586-9500, ext. 229 or e-mail firstname.lastname@example.org. Or visit NuTool in booth 6176, North Hall.
NuTool, Inc., a Silicon Valley company funded by the world's largest semiconductor companies, is the creator of new wafer processing technologies that deposits and planarizes copper in one step. Founded and led by former Applied Materials and OnTrak senior manager Homayoun Talieh, the company is currently pilot testing the NuTool 2000 at several customer sites. NuTool's sales and service representatives are Tokyo Electron Limited (TEL) and Hermes-Epitek.
NuTool, NuTool 2000, and ECMD are trademarks of NuTool, Inc.